MUSTAFOEVA , N. M.; MUSTAFAEVA , N. M. Q. EFFECT OF ION IMPLANTATION ON THE COMPOSITION, STRUCTURE AND OPTICAL PROPERTIES OF SILICON. Educational Research in Universal Sciences, [S. l.], v. 2, n. 12 SPECIAL, p. 116–120, 2023. Disponível em: http://erus.uz/index.php/er/article/view/4078. Acesso em: 5 dec. 2025.