Mustafoeva , Nodira Moyliyevna, and Nilufar Moyli Qizi Mustafaeva. 2023. “EFFECT OF ION IMPLANTATION ON THE COMPOSITION, STRUCTURE AND OPTICAL PROPERTIES OF SILICON”. Educational Research in Universal Sciences 2 (12 SPECIAL):116-20. http://erus.uz/index.php/er/article/view/4078.